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Process gas purification

Optimized solutions

Pall Premium Process Gas Purification Solutions

Pall’s process gas purification systems remove impurities that can lead to defects on the wafer. Molecular impurities, also known as gaseous or volatile impurities, are becoming of greater concern as sources of defects, and can be effectively removed with Pall’s purification solutions. These purifiers work to expel impurities including moisture, oxygen, carbon dioxide, carbon monoxide, hydrocarbons and metal carbonyls by using a reactive bed of material. Impurities are expelled from the gas stream in areas where traditional particle filtering is ineffective. Our materials provide background level contaminant removal without contributing metals or other harmful contaminants to the process stream. All Pall purifier assemblies contain an integral filter for particle removal.

 

Applications:

 

  • Inert gases
  • Noble gases
  • Nonreactive gases
  • Hyydride gases
  • Perfluorocarbon and corrosive gases.

 

Benefits:

 

  • Enhanced process stability
  • Increased area/process efficiency
  • Reduction in defects
  • Drop in retrofits to existing particle filters
  • Custom media tailored to purify a variety of gases
  • Low cost of ownership

 

Process gas purification systems and materials provide effective removal of impurities in areas where particle filtration is ineffective. Contact a Pall expert help you optimize your process gas purification systems and maximize your site’s performance by reducing defects and increasing yields.

Contact our team of filtration experts for more information on improving the efficiency of your process.

 

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Providing filtration, purification and separations solutions for a broad range of fluids, such as chemicals, gas, water, CMP slurries and photoresist.

Let’s find the right solution, together.

Let’s connect. We want to share our innovative filtration solutions with you today. Contact our knowledgeable subject matter experts for information on how we can help. Thank you and we look forward to assisting you shortly.

选择行业
  • 航空航天
  • 生物制药
  • 化工与聚合物
  • 食品与饮料
  • 工业制造
  • 实验室
  • 医疗
  • 微电子
  • 石油与天然气
  • 未分类
  • 电力与公共设施
选择问题类型
  • 一般咨询
  • 产品信息
  • 价格信息
  • 技术支持
  • 订单问题
  • 质量问题

Thank You

We will get in touch with you very shortly.