Pall Solvent Purification – Spontaneous Ion Removal
Surface clogging and removal of native slurry particles are typical process issues associated with slurry filtration. High-quality electrode coating and mixing requires reducing gels and particle contamination in electrode slurries. Filtration to remove aggregated slurry particles and reformed gelatinous material protects the narrow space between coater and substrate. One challenge, however, is electrode slurry characteristics and viscosities vary greatly, and are specific to each Lithium ion battery manufacturer. Viscosities of some cathode slurries are greater than 10,000 cp. Fortunately, Pall filters can easily handle these high viscosity slurries.
By implementing Pall’s industry leading filter designs, slurry particle size, shape, and density of Large Particle Counts (LPC’s) can be controlled to specified process parameters. Effective filtering leads to a reduction in defects and process excursions like micro scratching, over/under polish, chemical reactions, and stress cracks. Pall Slurry Filters are designed to maximize the substrate surface planarity in LED manufacturing. Cutting edge slurry filtration technologies lead to higher yields and less defects by eliminating agglomerations and aggregates.
Pall’s experts work to maximize sites filtering schemes to increase slurry life and extend the life of slurry distribution systems by proper implementation. There are many different options available to mitigate surface clogging and to reduce the removal of native slurry particles. StarKleen™ Filter Capsules and Profile® II Filters offer an optimized solution for improved LED manufacturing yield. Filters come in a variety of media and configurations for both bulk and POU applications to enable substrate producers to meet ultra-smooth requirements.
Applications include slurry recirculation/global loop and point-of-use (POU) applications where a capsule filter is installed closer to the polish. Filtration solutions can also be used on slurry suppliers tote/drum to the day tank. Enhanced process control and stability, increased area/process efficiency, extended slurry life, a reduction in defects, and extended Slurry Delivery System PM frequencies are all benefits of Pall’s premium slurry filtration solutions.
Optimize slurry filtration to maximize your processes performance. Pall’s superior Slurry Filters are designed to maximize semiconductor process performance. Contact us today for more information.
Meeting the future need of Li Ion production with advanced membrane and purification technologies for many process applications.
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