high purity. high efficiency.
Pall’s Wet Etch Clean Filters Remove Contaminants for the LED Market
As the size of substrate wafers used for LED manufacture increases so too does the volume of liquid chemical used in the cleaning and wet stripping processes. The filters used in these re-circulating chemical baths must provide high purity, high efficiency filtration and long service life to reduce the cost of the LED and High Brightness Light Emitting Diode (HBLED) manufacturing process.
UltiKleen series cartridge filters feature all-fluoropolymer construction, excellent compatibility and low extractables, as well as high flow rates. They are available in a range of removal ratings down to 20 nm.
Flex Bowl Filter Housing Systems offer a highly flexible modular filtration solution with minimal tool space required for filter change-out. Options include high purity reusable PFA housing, high purity PFA disposable capsule, or low cost HDPE disposable capsule.
The UltiKleen KC assembly is a completely disposable all-fluoropolymer filter assembly with no O-rings, excellent compatibility, high temperature and pressure capability.
Pall Wet Etch clean filters eradicate defect causing contaminants from crucial cleaning and wet stripping processes for the LED market. Contact a Pall expert today for more information.
Contact our team of filtration experts for more information on improving the efficiency of your process.
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