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Effectively Remove Molecular Impurities from Critical Process Gas Streams to Increase LED Yields
LED fabrication plants utilize bulk gas facilities supplying the plant with various high volume process gases. Within the fabrication facility bulk gases pass through gas distribution systems including valves, flow control devices and various monitoring equipment and need to be free from impurities for systems to run efficiently. Pall’s Process Gas Purification Systems remove impurities from process gases that pose a major threat to the vitality of the LED device.
Molecular impurities, also known as gaseous or volatile impurities, have recently become of greater concern as sources of defects and can be effectively removed with Pall’s expert purification solutions. Specially engineered filters work to expel impurities including moisture, oxygen, carbon dioxide, carbon monoxide, hydrocarbons and metal carbonyls. Purification systems utilize a reactive bed of material in order to expel impurities from the gas stream in areas where traditional particle filtering is ineffective. High purity materials are used which provide background level contaminant removal without contributing metals or other harmful contaminants to the process stream.
High Flow Emflon® filter elements and housings and High Flow gas purification skids are ideally suited to cost effective filtration and purification of bulk high purity gases. The purity of gasses entering process chambers are critical to LED device performance. Pall purifier assemblies provide gases at the required purity to meet LED manufacturing specifications. Designed for bulk gas applications in LED manufacturing where flow rates exceed 2000 Nm³/hr. High Flow Emflon filters are specially engineered to allow flow rates up to 6500 Nm³/hr through a single element. A 3 nm removal rating ensures that all volatile impurities are removed from process gas streams. All Pall filters are 100 % integrity tested and housings are available in a wide variety of connection sizes, types, surface finishes and code requirements to meet LED manufacturers specifications.
Gaskleen V filter assembly and Gaskleen purifier assemblies provide gases at the required purity needed for fabricating the active layers in an LED device using Metal-organic chemical vapor deposition (MOCVD). The purity of gas entering the reaction chamber is critical to LED device performance. The fluoropolymer cartridges in a stainless steel housing and an O-ringless design provide for excellent quality and high durability. The 3 nm particle removal secures removal of defect causing impurities. Gasket seal and compression fittings used in the filters construction offers a broad compatibility with several process gases used in LED manufacturing.
- Enhanced process stability
- Increased area/process efficiency
- Reduction in HBLED defects
- Drop in retrofits to existing particle filters
- Custom media tailored to purify a variety of gases
- Low Cost-of-Ownership (COO)
Pall’s Process Gas Purification systems and materials provide effective removal of impurities in areas where particle filtration is ineffective. Contact a Pall expert help you optimize your process gas purification systems to maximize your sites performance by reducing defects and increasing yields.
Contact our team of filtration experts for more information on improving the efficiency of your process.
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